Ansprechpartner

LZH and Beneq: Successful cooperation for ultrafast ALD coatings

Picture of C2R System developed by Beneq in cooperation with LZH.

Fast, high uniformity and superb coating quality – these properties not only apply to physical vapor deposition methods but also to atomic layer deposition (ALD). Beneq and LZH have teamed up to develop a spatial ALD system that can be used to coat complex-shaped optics at an unprecedented speed.