Procurement of a cluster system



The aim of the procurement by the Laser Components Department is to analyze the enormous potential of modern ALD processes in detail, and to further develop them for photonics and applications in energy and environment in the long term. By integrating different methods in a cluster tool, not only can the technical requirements for optical coating be implemented, but also the need for resource and energy savings as well as cost-effectiveness can be considered at an early stage of development.

Funded by the European Regional Development Fund

 Europäischer Fonds für regionale Entwicklung