A. Seidel
C. Ohrt
S. Passinger
C. Reinhardt
R. V. Kiyan
B. N. Chichkov

Nanoimprinting of dielectric loaded surface-plasmon-polariton waveguides using masters fabricated by 2-photon polymerization technique

Journal of the Optical Society of America B - Optical Physics
4
26
810-812
2009
Type: Zeitschriftenaufsatz (reviewed)
Abstract
We report on a method of making dielectric loaded surface-plasmon-polariton waveguides by nanoimprint lithography from master structures fabricated using two-photon polymerization. This method employing molds from polydimethylsiloxane allows rapid reproduction of waveguide structures using a large variety of resist and substrate materials. Both master and imprinted samples are characterized and compared. Measurements are performed on the imprinted samples using leakage radiation microscopy.