This chapter is dedicated to advanced monitoring and control concepts for deposition processes employed in the production of optical coatings. After a motivation before the background of recent challenges in optical coating technologies and their application, an introduction will be given into implementations of optical broad band monitoring concepts as well as related instruments to simulate deposition processes and to detect errors during a deposition run. Also, selected examples will be outlined to support the versatility of these new approaches. Finally, a section will be concentrated on ternary oxides as material mixtures and rugate fi lters produced by co-deposition processes.