A. Ostendorf
J. Koch
F. Meyer
B. N. Chichkov

Lithography by maskless laser direct writing

Pacific International Conference on Applications of Lasers and Optics (PICALO)
3.-5. April
Melbourne
2006
Type: Konferenzbeitrag
Abstract
Conventional lithography by laser mask projection has several drawbacks in terms of flexibility and costs which result in its use only for mass production. Small batches can be processed more easily and cost effectively by using direct laser writing. Laser direct ablation of resists and direct laser photopolymerisation can be used to achieve small structure sizes at acceptable costs. Depending on the strategy, also several processing steps can be skipped compared to the conventional mask exposure method. The paper describes advantages of the maskless laser lithography.