We report on the realization of aluminum oxyfluoride thin films and alumina/silica mixture coatings with different ratios by ion beam sputtering. The atomic compositions quantified by energy dispersive x-ray spectroscopy are correlated with the optical properties calculated from spectrophotometry and laser calorimetry measurements. Furthermore, the femtosecond laser damage resistance (τ=400  fs) of single layers is investigated in the infrared at 1030~nm and in the ultraviolet at 343~nm wavelengths. Experimental results on the wavelength scaling of the laser-induced damage threshold for oxyfluoride and oxide composite coatings are presented.