H. Ehlers
S. Schlichting
C. Schmitz
D. Ristau

Adaptive manufacturing of high precision optics based on virtual deposition and hybrid process control techniques

Chinese Optics Letters
Suppl
8
62-66
2010
Type: Zeitschriftenaufsatz (reviewed)
Abstract
The challenge in rapid production of high-precision optical coatings is the need to realize a variety of complex coating designs in one process environment. Two approaches to enhance a stable deposition process are presented. First, a virtual deposition system is applied for a pre-selection of coating designs that result in increased process stability using optical broadband monitoring strategies. Second, optical broadband monitoring is combined with additional quartz crystal sensors to realize a hybrid process control for improving layer thickness accuracy. Finally, a successful combination of both approaches is demonstrated by comparative studies on virtual and real deposition processes.