T. V. Amotchkina
M. K. Trubetskov
V. Pervak
S. Schlichting
H. Ehlers
D. Ristau
A. V. Tikhonravov

Comparison of algorithms used for optical characterization of multilayer optical coatings

Applied Optics
20
50
3389-3395
2011
Type: Zeitschriftenaufsatz (reviewed)
Abstract
Two algorithms used for the on-line and off-line characterization of multilayer optical coatings are experimentally compared using test samples produced by two different deposition processes and different monitoring approaches. One of these algorithms, called the triangular algorithm, demonstrates its superiority in all considered situations. We performed experiments with multilayer samples formed by high-density thin films, which allowed us to neglect possible errors in the film refractive indices and concentrate only on errors n the thicknesses of the layers of the produced coatings.