T. Alig
N. Bartels
P. Allenspacher
I. Balasa
T. Böntgen
D. Ristau
L. O. Jensen

Increasing the laser induced damage resistance of ultraviolet antireflective coatings by mitigation of damage precursors

Laser Congress 2020 (ASSL, LAC), OSA Technical Digest
AW1A.6
2020
Type: Zeitschriftenaufsatz (non-reviewed)
Abstract
Laser-induced damage resistance, ultraviolet antireflective coatings, damage precursors Abstract: We demonstrate the mitigation of nano-sized damage precursors during the manufacturing of IBS-coatings using bombardment with a secondary ion source and laser conditioning with a nanosecond-pulsed laser. Optical coatings show a significantly increased damage threshold.