T. Alig
S. Günster
D. Ristau

Photoluminescence of ion beam sputtered HfO2/Al2O3 and HfO2/SiO2 mixtures

Optical Interference Coatings, OSA Technical Digest
Type: Zeitschriftenaufsatz (non-reviewed)
Energy levels of ion beam sputtered hafnia mixed with alumina or silica were investigated by photoluminescence at 193 nm. The emission spectra originating from interstitial defects and oxygen vacancies were correlated to residual optical properties.