A. K. Rüßeler
P. Gehrke
G.-A. Hoffmann
G. Schönsee
A. Thiel
M. Vitt
A. Wienke
D. Ristau

Substrate-free miniaturized coarse wavelength division multiplexing filters

Optical Interference Coatings Conference (OIC)
19.-24. Juni
Type: Konferenzbeitrag
To unlock the benefits of thin-film filters, produced by means of ion beam sputtering, for compact, hybrid integrated optical systems, we have implemented a sacrificial-substrate approach to create high-precision miniaturized, substrate-free filters.