H. Badorreck
T. Kellermann
D. Barton
M. Steinecke
M. Jupé
D. Ristau
A. Wienke

Ion Beam Sputtering for Substrate Deposition with a Size of 2m: Simulation and Optimization

Proceedings of the Optical Interference Coatings Conference (OIC)
MC.5
2025
Type: Zeitschriftenaufsatz (non-reviewed)
Abstract
The deposition process by ion beam sputtering is scaled to a huge substrate size. Homogeneous coatings are optimized by adjusting the moveable target positions. A digital twin model combines gas flow and atomistic growth simulations.