S. Malobabic
M. Jupé
D. Ristau

Towards an electro-magnetic field separation of deposited material implemented in an ion beam sputter process

Applied Physics Letters
Type: Zeitschriftenaufsatz (reviewed)
Nowadays, Ion Beam Sputter (IBS) processes are very well optimized on an empirical basis. To achieve further progresses, a modification of the IBS process by guiding the coating material using an axial magnetic field and an additional electrical field has been studied. The electro-magnetic (EM) field leads to a significant change in plasma properties and deposition rate distributions, whereas an increase in deposition rate along the centerline of the axial EM field around 150\% was observed. These fundamental studies on the prototype are the basis for the development of an applicable and workable design of a separation device.