Direct 3D patterning of TiO2 using femtosecond laser pulses
Advanced Materials
         
          9
        
          19
        
          1218-1221
         
          2007
      
    
  
    Type: Zeitschriftenaufsatz (reviewed)
  
  
  
    Abstract    
      
          Direct 3D patterning of TiO2 with femtosecond laser pulses using a sol–gel-based negative-tone spin-coatable TiO2 resist is demonstrated (see figure). A layer of the resist was spun on glass and patterned in three dimensions by exposing it to femtosecond laser pulses and then developing in acetone. Heat treatment at 400 °C in air gave 3D patterns that were ca. 50 \% of their original size.