K. Obata
J. Koch
U. Hinze
B. N. Chichkov

Multi-focus two-photon polymerization technique based on individually controlled phase modulation

Optics Express
16
18
17193-17200
2010
Type: Zeitschriftenaufsatz (reviewed)
Abstract
Multi-focus two-photon polymerization with a spatial light modulator is demonstrated. The spatial light modulator generates multi-focus spots via phase modulation technique controlled by a computer generated hologram (CGH) pattern. Each focus spot can be individually addressed in position and laser intensity. The multi-focus two-photon polymerization technique allows the fabrication of complex 2-D and 3-D structures both symmetric and asymmetric. Smooth sine curved polymerized lines with amplitude of 5 μm and a period of 200 μm were obtained by fast switching of the CGH patterns.