J. Perwas
M. Springer
J. Düsing
J. Koch
P. Jäschke
S. Kaierle

Acousto-optic pulse-selective laser beam deflection for micromachining with ultrashort pulsed lasers

Conference on Lasers in Manufacturing (LiM)
26.-29. Juni
München
2023
Type: Konferenzbeitrag
Abstract
Acousto-optic deflection of laser beams promises the opportunity of fast pulse-by-pulse deflection without negative effects of inertia of traditional galvanometer scanner systems (GSS). Despite being known for quite some time, integration of acousto-optic deflectors (AODs) in conventional ultrashort pulsed laser machines still seem to be sparse. Our work addresses possible opportunities that result from combination of AODs optimized for wavelength of 515nm and 1064nm with traditional GSS as well as ps and fs lasers of average powers up to 10W and 25W. Therefore, development of an elaborated FPGA-based controller as well as an appropriate opt. setup for implementation into an existing laser machining setup has been investigated. Key has been the realization of sufficient interfaces and data processing structures in comb. with a comm. controller system for new and accelerated laser processing strategies such as pattern or multi spot deflection for improved material processing.