J. Perwas
M. Springer
J. Düsing
J. Koch
P. Jäschke
S. Kaierle

Acousto-optic pulse-selective laser beam deflection for micromachining with ultrashort pulsed lasers

Proc. Lasers in Manufacturing (LiM)
Type: Zeitschriftenaufsatz (non-reviewed)
Acousto-optic deflection of laser beams promises the opportunity of fast pulse-by-pulse deflection without negative effects of inertia of traditional galvanometer scanner systems. Despite being known for quite some time, integration of acousto-optic deflectors (AODs) in conventional ultrashort pulsed laser machines still seems to be sparse. Our work addresses possible opportunities that result from the combination of AODs optimized for wavelengths of 515~nm and 1064~nm with traditional galvanometer scanner systems as well as pico- and femtosecond lasers of average powers up to 10~W and 25~W. Therefore, the development of an elaborated FPGA-based controller as well as an appropriate optical setup for the implementation into an existing laser machining setup has been investigated. Key has been the realization of sufficient interfaces and data processing structures in combination with a commercial controller system for new and accelerated laser processing strategies such as pattern or multi spot deflection for improved material processing.