C. Hoff
K. Cromwell
J. Hermsdorf
M. Akin
M. C. Wurz
S. Kaierle
L. Overmeyer

Transmission laser bonding of low-melting eutectic alloys

SPIE Photonics West: LASE
13.-18. Februar
San Francisco
Type: Konferenzbeitrag
Transparent polymers with low glass transition temperatures are flexible materials and can serve as an optical waveguide or as substrates for the layer structure in applications such as humidity or temperature sensors. The background of this publication is the development of a laser-based process to bond silicon chips, which serve as emitter or detector in an optical system, on a substrate, without exposing the substrate to thermo-mechanical stress. Using transmission laser bonding of low-melting eutectic alloys, the necessary energy can be coupled into the fusion zone precisely to reduce the process time. In this paper, Si-chips with 52In48Sn and 66In34Bi layers are investigated to bond on rigid substrates. Experimental results are presented, which illustrate the mechanical stability of these compounds.