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H. Badorreck
T. Kellermann
D. Barton
M. Steinecke
M. Jupé
D. Ristau
A. Wienke

Ion Beam Sputtering for Substrate Deposition with a Size of 2m: Simulation and Optimization

Optical Interference Coatings Conference (OIC)
18.-23. Mai
Tucson
2025
Type: Konferenzbeitrag
Abstract

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