J. McCauley
M. Jupe
Z. Jinlong
A. Wienke
D. Ristau

Reduction of Nanoparticles in Optical Thin Films

Optical Interference Coatings Conference (OIC)
19.-24. Juni
Type: Konferenzbeitrag
The paper presents a concept for the reduction of nanoparticles in optical thin films using ion etching, to remove nanoparticles present on the substrate, and to reduce the effects of particles introduced during deposition.