Direct 3D patterning of TiO2 using femtosecond laser pulses
Advanced Materials
9
19
1218-1221
2007
Type: Zeitschriftenaufsatz (reviewed)
Abstract
Direct 3D patterning of TiO2 with femtosecond laser pulses using a sol–gel-based negative-tone spin-coatable TiO2 resist is demonstrated (see figure). A layer of the resist was spun on glass and patterned in three dimensions by exposing it to femtosecond laser pulses and then developing in acetone. Heat treatment at 400 °C in air gave 3D patterns that were ca. 50 \% of their original size.