T. S. Kavetskyy
M. F. Galyautdinov
V. F. Valeev
V. I. Nuzhdin
Y. N. Osin
A. B. Evlyukhin
A. L. Stepanov

The formation of periodic diffractive plasmonic nanostructures with implanted copper nanoparticles by local ion etching of silica glass

Technical Physics Letters
7
39
591-593
2013
Type: Zeitschriftenaufsatz (reviewed)
Abstract
Silica glass was subjected to a low-energy implantation with 40-keV Cu+ ions at a dose of 7.5 × 1016 ions/cm2 and an ion-beam current density of 5 μA/cm2 through a surface metal-wire mask with square holes of ∼40 μm. The formation of copper nanoparticles in the glass was determined from the occurrence of characteristic plasmon optical absorption and through the detection of particles using an atomic force micro- scope. The formation of periodic surface microstructures via the local etching of silica glass during implantation was observed using a scanning electron microscope. The operating efficiency of the diffractive optical plasmonic element based on silica glass microstructures with metallic copper nanoparticles was shown during its sounding by the emission of a helium-neon laser.