U. Hinze
A. Egbert
B. N. Chichkov

Applications of an electron-based EUV source: table-top grazing incidence reflectometer and imaging with a Schwarzschild objective

SPIE Advanced Lithography: Emerging Lithographic Technologies
1.-3. März
San Jose
2005
Type: Konferenzbeitrag
Abstract
Two applications of an electron-based EUV-tube are presented: the set up of a grazing incidence EUV reflectometer with high reproducibility and accuracy, and our works towards the realization and application of a Schwarzschild objective for EUV imaging. Both applications benefit form the use of the table-top EUV-source, which is debris-free, long-term stable, and compact.