Stress Compensation in Fluoride Coatings for the VUV Spectral Range
Optical Interference Coatings (OIC)
3.-8. Juni
Tucson
2007
Type: Konferenzbeitrag
Abstract
Fluoride materials deposited with conventional thermal evaporation techniques show a high tensile stress. The effect of stress compensation by inserting compressive silicon oxide layers into the tensile fluoride stack is investigated.