S. Günster
M. Dieckmann
H. Ehlers
D. Ristau

Stress Compensation in Fluoride Coatings for the VUV Spectral Range

Optical Interference Coatings (OIC)
3.-8. Juni
Tucson
2007
Type: Konferenzbeitrag
Abstract
Fluoride materials deposited with conventional thermal evaporation techniques show a high tensile stress. The effect of stress compensation by inserting compressive silicon oxide layers into the tensile fluoride stack is investigated.