T. Böntgen
M. Neufert
L. O. Jensen

Optical coatings – precision engineering on non-flat surfaces

EOS Annual Meeting (EOSAM)
07.-11. September
online
2020
Type: Konferenzbeitrag
Abstract
Manufacturing of optical coatings is about the precise deposition of material and its control on the nanometer scale. This has to be achieved for a stack of multiple layers with a total thickness that can reach several micrometer. In addition, this has to be maintained for the complete functional area. In this contribution we demonstrate a process capable of delivering these accuracies not only to flat but also to curved surfaces.