C. Schmitz
H. Ehlers
D. Ristau

Online Detection of Ozone in Ion Beam Sputtering

Optical Interference Coatings (OIC)
6.-11. Juni
Tucson
2010
Type: Konferenzbeitrag
Abstract
The contents of oxygen species are measured in the reactive atmosphere of an ion beam sputtering process. Based on oxygen sensor concepts, a reliable early detection for absorption in TiO2 layers is studied.