O. Suttmann
K. Obata
Y. Nakajima
A. Hohnholz
J. Koch
M. Terakawa
L. Overmeyer

UV Laser Photo-Polymerization of Elastic 2D/3D Structures Using Photo-Curable PDMS (Polydimethylsiloxane)

Proc. International Symposium on Laser Precision Microfabrication (LPM)
Type: Zeitschriftenaufsatz (non-reviewed)
2D/3D structuring of UV curable polydimethylsiloxane (PDMS) was developed using UV laser di-rect writing. In this technique, commercially available UV curable PDMS was locally polymerized to fabricate 1D and 2D single layer structures, as well as 3D multi-layer structures with sufficient stability in process resolutions. The tightly focused UV laser beam was scanned by an x-y galvano-metric mirror scanner on the UV curable PDMS layer coated on the glass substrate, so that 18μm of process resolution in X-Y plane was obtained. At the relevant wavelength of 355 nm, the absorb-ance of UV curable PDMS was 0.131, which is sufficient absorption for a photo-chemical reaction induced by the UV laser used in this study. In addition, UV curable PDMS has deep penetration depth longer than 3 mm, and enabled the fabrication of structure with aspect ratio of 2 in a single layer. Furthermore, the fabricated structure demonstrated mechanical strength to emphasize its elas-ticity.