K. Obata
U. Klug
J. Koch
O. Suttmann
L. Overmeyer

Hybrid Micro-stereo-lithography by Means of Aerosol Jet Printing Technology

J. Laser Micro. Nanoen.
Type: Zeitschriftenaufsatz (reviewed)
We have developed an advanced micro-stereo-lithography process combined with single photon polymerization and aerosol jet printing technology to facilitate layer based photo-polymerized struc-turing by layer on a non-flat surface, which is not possible by conventional macro- or micro- stereo-lithography. The aerosolized photo-sensitive polymer retains its photo-curable characteristics (com-pared with its original liquid state). The photo-polymerization using UV laser irradiation achieved 6 μm in the horizontal resolution, while aerosol jet printing technology achieved 0.6 μm in the verti-cal resolution, individually. By means of this process we successfully produced 2D and 3D struc-tures, and a straight-line photo-polymerized structure was produced on a non-flat surface