M. Desens
K. Wesang
A. Hohnholz
K. Jäschke
S. Kaierle
L. Overmeyer

Homogeneous annealing of TiO2, ZrO2 and ITO sol-gel layers with CO2 laser

11th CIRP Conference on Photonic Technologies (LANE)
07.-10. September
Type: Konferenzbeitrag
Laser annealed sol-gel layers have the potential to replace the furnace process and expand the field of applications for selective annealed sol-gel coatings. In this study laser annealed TiO2, ZrO2 and ITO layers on glasses are investigated. Processing parameters of the CO2-laser system such as scanning speed, line overlap, laser power and focal spot are evaluated to generate sufficient thermal energy for densification. The ITO annealing process results in a sheet resistance comparable with the furnace annealed samples. Microscope images of the TiO2 and ZrO2 samples show a homogeneous layer morphology. XRD images exhibit crystalline tetragonal ZrO2 as seen in thermally annealed layers.