Process analytics for thin-film processes
Prozessanalytik im IBS-Prozess. Bild: LZH

The Laser Zentrum Hannover e.V. (LZH) offers measurement series for thin-film processes that can be carried out on-site at the customer’s coating system, too. Based on the measurements, detailed reports including recommended actions are provided. 


At the LZH, a number of measurement technologies are available for the optimization of processes and parameters:

  • With the Retarding Field Analyzer technology (RFA), energy-dissolved ion-current densities can be measured. Herewith, e.g. ion-beam source parameters can be optimized.
  • Optical Emission Spectroscopy (OES) makes it possible to analyze, for example, a reactive process guidance.
  • The in-process, broadband transmission/reflection measurement can analyze the layer growth. In that way, the origin of inhomogeneities, interface and shift effects can be identified.
  • Spatially resolved measurements can help optimize, for example, the homogeneity (geometry, process parameter).

The sensors can be individually adapted to the given process environment and scope.

The evaluation of the measurement is documented in a report that, if requested, can be presented to the customer by experienced staff members.

This service is, among others, relevant for the following areas:

Optic coatings:

Analysis of the following coating processes:

  • Ion Beam Sputtering (IBS)
  • Ion Assisted Deposition (IAD)
  • Evaporation techniques
  • DC sputtering methoden

 We will be happy to discuss your individual requirements. Please feel free to contact us.