SYRUSpro Coating Unit with LZH broadband monitor BBM

MD simulation of the deposition of a titanium atom on a TiO2 ensemble

Investigation on the spatial expansion of the interaction zone during the deposition of a titanium atom with a kinetic energy of 10 eV

BBM system: Module for automatic re-optimization

Work of the group focusses on:

• Process development in the field of optical thin-film technologies for precision optics, laser technology and consumer optics applications
• Reactive thermal evaporation in a vacuum
• Ion and plasma assisted process concepts (IAD, Ion Assisted Deposition)
• IBS, Ion Beam Sputtering
• Optimization of coating processes, testing of new process concepts and technologies
• In-situ process control, sensors, process documentation
• Investigation of the basic interaction mechanisms for coating processes
• Adaptation of process components, e.g. ion sources (plasma analytics)
• Qualification of new materials, e.g. mixed materials, plastics, multifunctional coatings: photo-catalytic activity (such as antimicrobial effects)
• Software tools: design, simulation, quality assurance
• Implementation and consulting for industrial production, technology studies

Current scientific work and projects:

• Investigation of HfO2-based mixed layers for use in laser optics for the 355 nm wavelength, increase of laser durability for the 355 nm wavelength, as compared to classical pure materials and optimization of coatings on LBO crystals
• Increase of yield and precision using a broadband optical layer thickness monitor (BBM): Use of automated error corrections as well as tailor-made simulation environment for industrial production
• Expansion of process understanding of plasma-based processes, development of in-situ analysis for plasma characterization as well as the composition of the sputtered material (species and energy distribution)
• Modeling of layer growth, programming and use of molecular-dynamic simulations, combination with the results of in-situ analysis
• Realization of optical polymer coatings: Use of magnetron sputter technologies and an adapted IBS unit